AXCELIS TECHNOLOGIES INC — SCHEDULE 13G/A Filings
4 SCHEDULE 13G/A filings on record
This page lists all SCHEDULE 13G/A filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 4 SCHEDULE 13G/A documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-Q
10-Q/A
144
15-12G
3
3/A
4
4/A
424B3
424B4
425
5
5/A
8-A12G
8-K
8-K/A
ARS
CORRESP
DEF 14A
DEFA14A
DFAN14A
EFFECT
NT 10-K
POS AM
PRE 14A
S-1
S-1/A
S-3
S-3/A
S-3ASR
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13G
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| SCHEDULE 13G/A | — | 0000102909-26-000740 | Mar 26, 2026 | — |
| SCHEDULE 13G/A | — | 0000052388-25-000240 | Nov 14, 2025 | — |
| SCHEDULE 13G/A | — | 0002052113-25-001922 | Apr 29, 2025 | — |
| SCHEDULE 13G/A | — | 0000932471-25-000108 | Jan 30, 2025 | — |