AXCELIS TECHNOLOGIES INC — 5 Filings
11 5 filings on record
This page lists all 5 filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 11 5 documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-Q
10-Q/A
144
15-12G
3
3/A
4
4/A
424B3
424B4
425
5
5/A
8-A12G
8-K
8-K/A
ARS
CORRESP
DEF 14A
DEFA14A
DFAN14A
EFFECT
NT 10-K
POS AM
PRE 14A
S-1
S-1/A
S-3
S-3/A
S-3ASR
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13G
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| 5 | FORM 5 2002 | 0001181431-03-001928 | Feb 10, 2003 | Dec 31, 2002 |
| 5 | FORM 5 2002 | 0001181431-03-001914 | Feb 10, 2003 | Dec 31, 2002 |
| 5 | HARDIS FORM 5 2002 | 0001181431-03-001864 | Feb 7, 2003 | Dec 31, 2002 |
| 5 | FORM 5 2002 | 0001181431-03-001824 | Feb 7, 2003 | Dec 31, 2002 |
| 5 | FORM 5 2002 | 0001181431-03-001662 | Feb 5, 2003 | Dec 31, 2002 |
| 5 | FORM 5 2002 | 0001181431-03-001488 | Feb 3, 2003 | Dec 31, 2002 |
| 5 | FORM 5 2002 | 0001181431-03-001476 | Feb 3, 2003 | Dec 31, 2002 |
| 5 | FORM 5 2002 | 0001181431-03-001473 | Feb 3, 2003 | Dec 31, 2002 |
| 5 | FORM 5 2002 | 0001181431-03-001471 | Feb 3, 2003 | Dec 31, 2002 |
| 5 | 2002 FORM 5 | 0001181431-03-001470 | Feb 3, 2003 | Dec 31, 2002 |
| 5 | FORM 5 2002 | 0001181431-03-001468 | Feb 3, 2003 | Dec 31, 2002 |