AXCELIS TECHNOLOGIES INC — ARS Filings
17 ARS filings on record
This page lists all ARS filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 17 ARS documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-Q
10-Q/A
144
15-12G
3
3/A
4
4/A
424B3
424B4
425
5
5/A
8-A12G
8-K
8-K/A
ARS
CORRESP
DEF 14A
DEFA14A
DFAN14A
EFFECT
NT 10-K
POS AM
PRE 14A
S-1
S-1/A
S-3
S-3/A
S-3ASR
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13G
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| ARS | ARS | 0001104659-25-029634 | Mar 31, 2025 | Dec 31, 2024 |
| ARS | ARS | 0001104659-24-040857 | Mar 29, 2024 | Dec 31, 2023 |
| ARS | ARS | 0001104659-23-039637 | Mar 31, 2023 | Dec 31, 2022 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-15-007498 | Mar 25, 2015 | Dec 31, 2014 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-14-008509 | Apr 9, 2014 | Dec 31, 2013 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-13-007733 | Apr 4, 2013 | Dec 31, 2012 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-12-005560 | Mar 26, 2012 | Dec 31, 2011 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-11-007115 | Mar 30, 2011 | Dec 31, 2010 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-10-007705 | Mar 25, 2010 | Dec 31, 2009 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-09-017585 | Apr 7, 2009 | Dec 31, 2008 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-08-017642 | Mar 31, 2008 | Dec 31, 2007 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-07-016268 | Apr 2, 2007 | Dec 31, 2006 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-06-014186 | Apr 3, 2006 | Dec 31, 2005 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-05-016780 | Apr 4, 2005 | Dec 31, 2004 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-04-010537 | Mar 17, 2004 | Dec 31, 2003 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-03-020161 | May 1, 2003 | Dec 31, 2002 |
| ARS | AUTO-GENERATED PAPER DOCUMENT | 9999999997-02-017186 | Mar 20, 2002 | Dec 31, 2001 |