AXCELIS TECHNOLOGIES INC — 10-K Filings
25 10-K filings on record
This page lists all 10-K filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 25 10-K documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-Q
10-Q/A
144
15-12G
3
3/A
4
4/A
424B3
424B4
425
5
5/A
8-A12G
8-K
8-K/A
ARS
CORRESP
DEF 14A
DEFA14A
DFAN14A
EFFECT
NT 10-K
POS AM
PRE 14A
S-1
S-1/A
S-3
S-3/A
S-3ASR
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13G
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| 10-K | 10-K | 0001104659-26-020461 | Feb 26, 2026 | Dec 31, 2025 |
| 10-K | 10-K | 0001558370-25-001855 | Feb 28, 2025 | Dec 31, 2024 |
| 10-K | 10-K | 0001558370-24-001628 | Feb 23, 2024 | Dec 31, 2023 |
| 10-K | 10-K | 0001558370-23-002006 | Feb 24, 2023 | Dec 31, 2022 |
| 10-K | 10-K | 0001558370-22-002096 | Feb 25, 2022 | Dec 31, 2021 |
| 10-K | 10-K | 0001558370-21-001972 | Feb 26, 2021 | Dec 31, 2020 |
| 10-K | 10-K | 0001558370-20-001858 | Mar 2, 2020 | Dec 31, 2019 |
| 10-K | 10-K | 0001558370-19-001791 | Mar 11, 2019 | Dec 31, 2018 |
| 10-K | 10-K | 0001558370-18-002060 | Mar 14, 2018 | Dec 31, 2017 |
| 10-K | 10-K | 0001558370-17-001778 | Mar 14, 2017 | Dec 31, 2016 |
| 10-K | 10-K | 0001047469-16-010788 | Mar 4, 2016 | Dec 31, 2015 |
| 10-K | 10-K | 0001047469-15-001994 | Mar 11, 2015 | Dec 31, 2014 |
| 10-K | 10-K | 0001047469-14-001681 | Mar 3, 2014 | Dec 31, 2013 |
| 10-K | 10-K | 0001047469-13-002045 | Mar 1, 2013 | Dec 31, 2012 |
| 10-K | 10-K | 0001047469-12-001874 | Feb 29, 2012 | Dec 31, 2011 |
| 10-K | 10-K | 0001047469-11-002119 | Mar 14, 2011 | Dec 31, 2010 |
| 10-K | 10-K | 0001047469-10-002204 | Mar 15, 2010 | Dec 31, 2009 |
| 10-K | 10-K | 0001047469-09-003537 | Mar 31, 2009 | Dec 31, 2008 |
| 10-K | FORM 10-K | 0001047469-08-002914 | Mar 17, 2008 | Dec 31, 2007 |
| 10-K | 10-K | 0001104659-07-019614 | Mar 15, 2007 | Dec 31, 2006 |
| 10-K | ANNUAL REPORT PURSUANT TO SECTION 13 AND 15(D) | 0001104659-06-016419 | Mar 14, 2006 | Dec 31, 2005 |
| 10-K | FORM 10-K | 0001047469-05-006525 | Mar 15, 2005 | Dec 31, 2004 |
| 10-K | AXCELIS TECHNOLOGIES, INC. FORM 10-K | 0001113232-04-000002 | Mar 8, 2004 | Dec 31, 2003 |
| 10-K | AXCELIS TECHNOLOGIES, INC. FORM 10-K | 0001113232-03-000002 | Mar 28, 2003 | Dec 31, 2002 |
| 10-K | MAIN FORM 10-K | 0001113232-01-500003 | Mar 30, 2001 | Dec 31, 2000 |