AXCELIS TECHNOLOGIES INC — SC 13G/A Filings
96 SC 13G/A filings on record
This page lists all SC 13G/A filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 96 SC 13G/A documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-Q
10-Q/A
144
15-12G
3
3/A
4
4/A
424B3
424B4
425
5
5/A
8-A12G
8-K
8-K/A
ARS
CORRESP
DEF 14A
DEFA14A
DFAN14A
EFFECT
NT 10-K
POS AM
PRE 14A
S-1
S-1/A
S-3
S-3/A
S-3ASR
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13G
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| SC 13G/A | — | 0002012383-24-003662 | Nov 8, 2024 | — |
| SC 13G/A | — | 0002012383-24-000634 | Oct 18, 2024 | — |
| SC 13G/A | SCHEDULE 13G/A | 0001104659-24-020379 | Feb 13, 2024 | — |
| SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 0000902664-24-001374 | Feb 9, 2024 | — |
| SC 13G/A | — | 0001086364-24-000386 | Jan 19, 2024 | — |
| SC 13G/A | SCHEDULE 13G/A | 0001104659-23-043474 | Apr 10, 2023 | — |
| SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 0000902664-23-001472 | Feb 10, 2023 | — |
| SC 13G/A | SCHEDULE 13G/A | 0001104659-23-015404 | Feb 9, 2023 | — |
| SC 13G/A | — | 0001306550-23-004023 | Jan 26, 2023 | — |
| SC 13G/A | — | 0001306550-23-000591 | Jan 20, 2023 | — |
| SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | 0001085146-22-003277 | Oct 7, 2022 | — |
| SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | 0001085146-22-000716 | Feb 10, 2022 | — |
| SC 13G/A | SCHEDULE 13G/A | 0001104659-22-016582 | Feb 9, 2022 | — |
| SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 0000902664-22-001296 | Feb 9, 2022 | — |
| SC 13G/A | SEC SCHEDULE 13G | 0000354204-22-001666 | Feb 8, 2022 | — |
| SC 13G/A | — | 0000834237-22-003222 | Jan 28, 2022 | — |
| SC 13G/A | SC 13G/A | 0001104659-21-021536 | Feb 12, 2021 | — |
| SC 13G/A | SEC SCHEDULE 13G | 0000354204-21-000290 | Feb 12, 2021 | — |
| SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 0000902664-21-001297 | Feb 12, 2021 | — |
| SC 13G/A | SCHEDULE 13G/A | 0001104659-21-017534 | Feb 10, 2021 | — |
| SC 13G/A | SEC SCHEDULE 13G | 0000902219-21-000203 | Feb 4, 2021 | — |
| SC 13G/A | — | 0000834237-21-001361 | Jan 26, 2021 | — |
| SC 13G/A | SCHEDULE 13G/A | 0001258897-20-000806 | Feb 12, 2020 | — |
| SC 13G/A | SCHEDULE 13G/A | 0001104659-20-018701 | Feb 12, 2020 | — |
| SC 13G/A | SC 13G/A | 0001104659-20-019057 | Feb 12, 2020 | — |
| SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 0000902664-20-000818 | Feb 7, 2020 | — |
| SC 13G/A | — | 0000834237-20-001628 | Feb 4, 2020 | — |
| SC 13G/A | SEC SCHEDULE 13G | 0000902219-20-000080 | Jan 27, 2020 | — |
| SC 13G/A | SEC SCHEDULE 13G | 0000902219-19-000149 | Feb 12, 2019 | — |
| SC 13G/A | — | 0000932471-19-004698 | Feb 11, 2019 | — |
| SC 13G/A | SCHEDULE 13G/A | 0001258897-19-001508 | Feb 8, 2019 | — |
| SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 0000902664-19-000738 | Feb 8, 2019 | — |
| SC 13G/A | SC 13G/A | 0001104659-19-006785 | Feb 8, 2019 | — |
| SC 13G/A | — | 0000215457-19-000999 | Jan 24, 2019 | — |
| SC 13G/A | SEC SCHEDULE 13G | 0000902219-18-000481 | Jul 10, 2018 | — |
| SC 13G/A | — | 0000902664-18-000898 | Feb 12, 2018 | — |
| SC 13G/A | SCHEDULE 13G/A | 0001258897-18-001517 | Feb 9, 2018 | — |
| SC 13G/A | — | 0000215457-18-002169 | Jan 23, 2018 | — |
| SC 13G/A | SC 13G/A | 0001104659-18-000738 | Jan 4, 2018 | — |
| SC 13G/A | — | 0000215457-17-003778 | Nov 9, 2017 | — |
| SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 0000902664-17-001095 | Feb 13, 2017 | — |
| SC 13G/A | SC 13G/A | 0001104659-17-007691 | Feb 9, 2017 | — |
| SC 13G/A | — | 0000215457-17-001319 | Jan 19, 2017 | — |
| SC 13G/A | 13G / A FILING | 0000814375-16-000080 | Nov 23, 2016 | — |
| SC 13G/A | 13-G/A FILING | 0000814375-16-000077 | Sep 30, 2016 | — |
| SC 13G/A | SC 13G/A | 0001104659-16-096125 | Feb 12, 2016 | — |
| SC 13G/A | SENVEST MANAGEMENT, LLC | 0000902664-16-005642 | Feb 12, 2016 | — |
| SC 13G/A | — | 0000215457-16-002086 | Jan 25, 2016 | — |
| SC 13G/A | SC 13G/A | 0001104659-15-010199 | Feb 13, 2015 | — |
| SC 13G/A | — | 0001086364-15-001241 | Jan 30, 2015 | — |