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AXCELIS TECHNOLOGIES INC — 5/A Filings

2 5/A filings on record

This page lists all 5/A filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 2 5/A documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.

Overview All Filings Financials Insiders
All 10-K 10-K/A 10-K405 10-Q 10-Q/A 144 15-12G 3 3/A 4 4/A 424B3 424B4 425 5 5/A 8-A12G 8-K 8-K/A ARS CORRESP DEF 14A DEFA14A DFAN14A EFFECT NT 10-K POS AM PRE 14A S-1 S-1/A S-3 S-3/A S-3ASR S-4 S-4/A S-8 S-8 POS SC 13D SC 13D/A SC 13G SC 13G/A SCHEDULE 13G SCHEDULE 13G/A SD UPLOAD
Form Description Accession Number Filed Period
5/A THOMPSON FORM 5A 2002 0001181431-03-001825 Feb 7, 2003 Dec 31, 2002
5/A FORM 5A FOR 2000 0001181431-03-001039 Jan 28, 2003 Dec 31, 2000