AXCELIS TECHNOLOGIES INC — 3 Filings
38 3 filings on record
This page lists all 3 filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 38 3 documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-Q
10-Q/A
144
15-12G
3
3/A
4
4/A
424B3
424B4
425
5
5/A
8-A12G
8-K
8-K/A
ARS
CORRESP
DEF 14A
DEFA14A
DFAN14A
EFFECT
NT 10-K
POS AM
PRE 14A
S-1
S-1/A
S-3
S-3/A
S-3ASR
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13G
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| 3 | — | 0002124265-26-000002 | Mar 25, 2026 | Mar 12, 2026 |
| 3 | — | 0002123863-26-000002 | Mar 24, 2026 | Mar 12, 2026 |
| 3 | — | 0002101601-25-000002 | Dec 22, 2025 | Dec 19, 2025 |
| 3 | — | 0001415889-24-029047 | Dec 12, 2024 | — |
| 3 | — | 0001415889-24-005744 | Feb 28, 2024 | — |
| 3 | — | 0001415889-24-005742 | Feb 28, 2024 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-23-050823 | Sep 29, 2023 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-23-047911 | Sep 1, 2023 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-23-036300 | Jun 12, 2023 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-22-048770 | Sep 6, 2022 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-22-012247 | Feb 23, 2022 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-22-012238 | Feb 23, 2022 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-19-046187 | Aug 15, 2019 | Aug 14, 2019 |
| 3 | FORM 3 SUBMISSION | 0001209191-18-030634 | May 16, 2018 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-16-150006 | Nov 15, 2016 | Nov 10, 2016 |
| 3 | FORM 3 SUBMISSION | 0001209191-15-042164 | May 13, 2015 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-15-042163 | May 13, 2015 | — |
| 3 | FORM 3 SUBMISSION | 0001209191-15-042162 | May 13, 2015 | — |
| 3 | — | 0001181431-14-019461 | May 14, 2014 | May 13, 2014 |
| 3 | — | 0001181431-14-019460 | May 14, 2014 | May 13, 2014 |
| 3 | LAWSON FORM 3 | 0001181431-13-058894 | Nov 14, 2013 | Nov 13, 2013 |
| 3 | ALDEBORGH FORM 3 | 0001181431-13-009223 | Feb 13, 2013 | — |
| 3 | KEITHLEY FORM 3 | 0001181431-11-043836 | Aug 4, 2011 | Aug 3, 2011 |
| 3 | BRAUN FORM 3 | 0001181431-11-006914 | Feb 3, 2011 | Feb 2, 2011 |
| 3 | — | 0001181431-11-003876 | Jan 18, 2011 | Jan 15, 2011 |
| 3 | BINTZ FORM 3 | 0001181431-07-057664 | Sep 17, 2007 | — |
| 3 | WILD FORM 3 | 0001181431-06-062605 | Nov 9, 2006 | Nov 8, 2006 |
| 3 | POND FORM 3 | 0001181431-06-008171 | Feb 3, 2006 | Feb 1, 2006 |
| 3 | LEVINE FORM 3 | 0001181431-05-045259 | Aug 8, 2005 | — |
| 3 | NARUTO FORM 3 | 0001181431-05-030017 | May 24, 2005 | May 23, 2005 |
| 3 | — | 0001181431-05-029217 | May 19, 2005 | May 12, 2005 |
| 3 | — | 0001181431-05-029076 | May 19, 2005 | May 12, 2005 |
| 3 | PALETTE FORM 3 | 0001181431-05-003484 | Jan 19, 2005 | Jan 10, 2005 |
| 3 | FLYNN FORM 3 | 0001181431-05-003483 | Jan 19, 2005 | Jan 10, 2005 |
| 3 | BREWER FORM 3 | 0001181431-05-003481 | Jan 19, 2005 | Jan 10, 2005 |
| 3 | FORM 3 FLETCHER | 0001181431-03-027440 | Oct 24, 2003 | Oct 23, 2003 |
| 3 | BASSETT FORM 3 | 0001181431-03-012372 | Jul 1, 2003 | Jun 26, 2003 |
| 3 | JENNINGS FORM 3 | 0001181431-03-002757 | Feb 14, 2003 | Feb 13, 2003 |