AXCELIS TECHNOLOGIES INC — SC 13G Filings
35 SC 13G filings on record
This page lists all SC 13G filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 35 SC 13G documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-Q
10-Q/A
144
15-12G
3
3/A
4
4/A
424B3
424B4
425
5
5/A
8-A12G
8-K
8-K/A
ARS
CORRESP
DEF 14A
DEFA14A
DFAN14A
EFFECT
NT 10-K
POS AM
PRE 14A
S-1
S-1/A
S-3
S-3/A
S-3ASR
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13G
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| SC 13G | AXCELIS TECHNOLOGIES, INC. | 0000902664-22-004650 | Oct 27, 2022 | — |
| SC 13G | 2017 13-G FILING | 0000814375-18-000025 | Feb 13, 2018 | — |
| SC 13G | — | 0000932471-18-002672 | Feb 8, 2018 | — |
| SC 13G | SEC SCHEDULE 13G | 0000902219-18-000007 | Jan 10, 2018 | — |
| SC 13G | 13-G FILING | 0000814375-17-000002 | Feb 9, 2017 | — |
| SC 13G | SCHEDULE 13G | 0001258897-17-001286 | Feb 9, 2017 | — |
| SC 13G | 2015 13-G FILING | 0000814375-16-000041 | Feb 10, 2016 | — |
| SC 13G | AXCELIS TECHNOLOGIES, INC. | 0000902664-15-002942 | Jun 30, 2015 | — |
| SC 13G | DECEMBER 31, 2014 13-G FILING | 0000814375-15-000004 | Feb 3, 2015 | — |
| SC 13G | SC 13G | 0001104659-14-035767 | May 7, 2014 | — |
| SC 13G | 13-G FILING | 0000814375-14-000007 | Feb 7, 2014 | — |
| SC 13G | 13-G FILING AS OF DECEMBER 31, 2012 | 0000814375-13-000003 | Feb 13, 2013 | — |
| SC 13G | 13-G FILING AS OF DECEMBER 31, 2011 | 0000814375-12-000004 | Feb 13, 2012 | — |
| SC 13G | 13G FILING DECEMBER 31, 2010 | 0000814375-11-000004 | Feb 11, 2011 | — |
| SC 13G | — | 0001086364-11-002335 | Feb 2, 2011 | — |
| SC 13G | — | 0000950159-10-000130 | Feb 12, 2010 | — |
| SC 13G | 13G FILING AS OF DECEMBER 31, 2009 | 0000814375-10-000011 | Feb 11, 2010 | — |
| SC 13G | CONVERT FROM 13D TO 13G | 0001329883-09-000053 | Feb 25, 2009 | — |
| SC 13G | 13-G FILING FOR DECEMBER 31, 2008 | 0000814375-09-000001 | Feb 11, 2009 | — |
| SC 13G | — | 0000913414-09-003118 | Feb 5, 2009 | — |
| SC 13G | AXCELIS 13G | 0001329883-08-000061 | Aug 29, 2008 | — |
| SC 13G | 13G FILING AS OF DECEMBER 31, 2007 | 0000814375-08-000002 | Feb 8, 2008 | — |
| SC 13G | — | 0000913414-08-003266 | Feb 5, 2008 | — |
| SC 13G | AXCELIS 13G AS OF 10/31/07 | 0001329883-07-000043 | Nov 9, 2007 | — |
| SC 13G | 13G FILING 2006 ACLS | 0000814375-07-000054 | Feb 13, 2007 | — |
| SC 13G | SCHEDULE 13G | 0000898430-07-000745 | Feb 2, 2007 | — |
| SC 13G | — | 0000913414-07-001593 | Jan 23, 2007 | — |
| SC 13G | AXCELIS TECHNOLOGIES, INC. | 0001193125-06-013655 | Jan 27, 2006 | — |
| SC 13G | SCHEDULE 13G | 0000895345-05-000183 | Feb 16, 2005 | — |
| SC 13G | — | 0000064782-04-000011 | Dec 10, 2004 | — |
| SC 13G | DOC ONE | 0000315066-04-000354 | Feb 17, 2004 | — |
| SC 13G | AXCELIS 13G AS OF 12/31/02 | 0001133527-03-000028 | Feb 4, 2003 | — |
| SC 13G | DOC ONE | 0000315066-02-000435 | Feb 13, 2002 | — |
| SC 13G | AXCELIS TECHNOLOGIES, INC. | 0000932471-02-000276 | Feb 12, 2002 | — |
| SC 13G | — | 0000902219-01-000009 | Feb 9, 2001 | — |