AXCELIS TECHNOLOGIES INC — 4 Filings
814 4 filings on record
This page lists all 4 filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 814 4 documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-Q
10-Q/A
144
15-12G
3
3/A
4
4/A
424B3
424B4
425
5
5/A
8-A12G
8-K
8-K/A
ARS
CORRESP
DEF 14A
DEFA14A
DFAN14A
EFFECT
NT 10-K
POS AM
PRE 14A
S-1
S-1/A
S-3
S-3/A
S-3ASR
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13G
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| 4 | — | 0001689237-26-000004 | Mar 26, 2026 | Mar 24, 2026 |
| 4 | — | 0002101601-26-000004 | Mar 3, 2026 | Mar 2, 2026 |
| 4 | — | 0001940017-26-000002 | Mar 3, 2026 | Mar 2, 2026 |
| 4 | — | 0001990732-26-000002 | Mar 3, 2026 | Mar 2, 2026 |
| 4 | — | 0001797868-26-000002 | Mar 3, 2026 | Mar 2, 2026 |
| 4 | — | 0001689237-26-000002 | Mar 3, 2026 | Mar 2, 2026 |
| 4 | — | 0001979418-26-000002 | Mar 3, 2026 | Mar 2, 2026 |
| 4 | — | 0001385162-26-000002 | Feb 23, 2026 | Feb 20, 2026 |
| 4 | — | 0002101601-26-000002 | Jan 16, 2026 | Jan 15, 2026 |
| 4 | — | 0001385162-25-000004 | Dec 18, 2025 | Dec 17, 2025 |
| 4 | — | 0001715912-25-000004 | Dec 18, 2025 | Dec 16, 2025 |
| 4 | — | 0001979418-25-000004 | Dec 12, 2025 | Dec 11, 2025 |
| 4 | — | 0001797868-25-000004 | Oct 17, 2025 | Oct 16, 2025 |
| 4 | — | 0001940017-25-000004 | Sep 17, 2025 | Sep 15, 2025 |
| 4 | — | 0001990732-25-000004 | Sep 17, 2025 | Sep 15, 2025 |
| 4 | — | 0001415889-25-017560 | Jun 17, 2025 | Jun 16, 2025 |
| 4 | — | 0001415889-25-017561 | Jun 17, 2025 | Jun 16, 2025 |
| 4 | — | 0001415889-25-013958 | May 21, 2025 | May 20, 2025 |
| 4 | — | 0001415889-25-013804 | May 20, 2025 | May 16, 2025 |
| 4 | — | 0001415889-25-013805 | May 20, 2025 | May 16, 2025 |
| 4 | — | 0001415889-25-013644 | May 19, 2025 | May 15, 2025 |
| 4 | — | 0001415889-25-013647 | May 19, 2025 | May 15, 2025 |
| 4 | — | 0001415889-25-013643 | May 19, 2025 | May 15, 2025 |
| 4 | — | 0001415889-25-013645 | May 19, 2025 | May 15, 2025 |
| 4 | — | 0001415889-25-013646 | May 19, 2025 | May 15, 2025 |
| 4 | — | 0001415889-25-013217 | May 15, 2025 | — |
| 4 | — | 0001415889-25-013218 | May 15, 2025 | — |
| 4 | — | 0001415889-25-013219 | May 15, 2025 | — |
| 4 | — | 0001415889-25-013220 | May 15, 2025 | — |
| 4 | — | 0001415889-25-013216 | May 15, 2025 | — |
| 4 | — | 0001415889-25-013221 | May 15, 2025 | — |
| 4 | — | 0001415889-25-013214 | May 15, 2025 | — |
| 4 | — | 0001415889-25-013215 | May 15, 2025 | — |
| 4 | — | 0001415889-25-011152 | Apr 22, 2025 | Apr 21, 2025 |
| 4 | — | 0001415889-25-006550 | Mar 4, 2025 | Feb 28, 2025 |
| 4 | — | 0001415889-25-006551 | Mar 4, 2025 | Feb 28, 2025 |
| 4 | — | 0001415889-25-006547 | Mar 4, 2025 | Feb 28, 2025 |
| 4 | — | 0001415889-25-006548 | Mar 4, 2025 | Feb 28, 2025 |
| 4 | — | 0001415889-25-006549 | Mar 4, 2025 | Feb 28, 2025 |
| 4 | — | 0001415889-25-000958 | Jan 7, 2025 | Jan 3, 2025 |
| 4 | — | 0001415889-24-029404 | Dec 16, 2024 | — |
| 4 | — | 0001415889-24-025388 | Oct 17, 2024 | Oct 16, 2024 |
| 4 | — | 0001415889-24-023522 | Sep 17, 2024 | Sep 16, 2024 |
| 4 | — | 0001415889-24-023523 | Sep 17, 2024 | Sep 16, 2024 |
| 4 | — | 0001415889-24-020845 | Aug 6, 2024 | — |
| 4 | — | 0001415889-24-018031 | Jun 24, 2024 | Jun 20, 2024 |
| 4 | — | 0001415889-24-017398 | Jun 18, 2024 | Jun 17, 2024 |
| 4 | — | 0001415889-24-017399 | Jun 18, 2024 | Jun 17, 2024 |
| 4 | — | 0001415889-24-015555 | Jun 5, 2024 | — |
| 4 | — | 0001415889-24-015556 | Jun 5, 2024 | — |