AXCELIS TECHNOLOGIES INC — DEF 14A Filings
25 DEF 14A filings on record
This page lists all DEF 14A filings submitted to the SEC by AXCELIS TECHNOLOGIES INC (ACLS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AXCELIS TECHNOLOGIES INC has filed 25 DEF 14A documents with the SEC since 2011. To view all SEC filings by AXCELIS TECHNOLOGIES INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-Q
10-Q/A
144
15-12G
3
3/A
4
4/A
424B3
424B4
425
5
5/A
8-A12G
8-K
8-K/A
ARS
CORRESP
DEF 14A
DEFA14A
DFAN14A
EFFECT
NT 10-K
POS AM
PRE 14A
S-1
S-1/A
S-3
S-3/A
S-3ASR
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13G
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| DEF 14A | DEF 14A | 0001104659-25-029630 | Mar 31, 2025 | May 7, 2025 |
| DEF 14A | FORM DEF 14A | 0001104659-24-040855 | Mar 29, 2024 | May 9, 2024 |
| DEF 14A | FORM DEF 14A | 0001104659-23-039635 | Mar 31, 2023 | — |
| DEF 14A | DEF 14A | 0001104659-22-039803 | Mar 30, 2022 | May 10, 2022 |
| DEF 14A | DEF 14A | 0001047469-21-000721 | Mar 25, 2021 | May 12, 2021 |
| DEF 14A | DEF 14A | 0001047469-20-001907 | Mar 30, 2020 | May 19, 2020 |
| DEF 14A | DEF 14A | 0001047469-19-001654 | Mar 27, 2019 | May 14, 2019 |
| DEF 14A | DEF 14A | 0001047469-18-002171 | Mar 27, 2018 | May 16, 2018 |
| DEF 14A | DEF 14A | 0001047469-17-002103 | Mar 29, 2017 | May 16, 2017 |
| DEF 14A | DEF 14A | 0001047469-16-011101 | Mar 14, 2016 | Apr 4, 2016 |
| DEF 14A | DEF 14A | 0001047469-15-002682 | Mar 25, 2015 | May 13, 2015 |
| DEF 14A | DEF 14A | 0001047469-14-002919 | Mar 25, 2014 | May 13, 2014 |
| DEF 14A | DEF 14A | 0001047469-13-003375 | Mar 26, 2013 | May 14, 2013 |
| DEF 14A | DEF 14A | 0001047469-12-003171 | Mar 23, 2012 | May 2, 2012 |
| DEF 14A | DEF 14A | 0001047469-11-002577 | Mar 24, 2011 | Apr 26, 2011 |
| DEF 14A | DEF 14A | 0001047469-10-002596 | Mar 23, 2010 | May 7, 2010 |
| DEF 14A | DEF 14A | 0001047469-09-003726 | Apr 2, 2009 | May 6, 2009 |
| DEF 14A | DEF 14A | 0001047469-08-003508 | Mar 27, 2008 | May 1, 2008 |
| DEF 14A | DEF 14A | 0001104659-07-023923 | Mar 30, 2007 | May 9, 2007 |
| DEF 14A | DEF 14A | 0001047469-06-004329 | Mar 31, 2006 | May 3, 2006 |
| DEF 14A | DEF 14A | 0001047469-05-008735 | Apr 1, 2005 | May 12, 2005 |
| DEF 14A | DEF 14A | 0001047469-04-008392 | Mar 18, 2004 | Apr 29, 2004 |
| DEF 14A | DEFINITIVE PROXY STATEMENT | 0001113232-03-000003 | May 1, 2003 | Apr 30, 2003 |
| DEF 14A | DEFINITIVE PROXY STATEMENT | 0001113232-02-000004 | Mar 20, 2002 | May 1, 2002 |
| DEF 14A | DEF 14A | 0001133884-01-500232 | Apr 30, 2001 | Jun 28, 2001 |