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AMTECH SYSTEMS INC — DEF 14A Filings

31 DEF 14A filings on record

This page lists all DEF 14A filings submitted to the SEC by AMTECH SYSTEMS INC (ASYS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AMTECH SYSTEMS INC has filed 31 DEF 14A documents with the SEC since 1995. To view all SEC filings by AMTECH SYSTEMS INC, see the full filings list.

Overview All Filings Financials Insiders
All 10-K 10-K/A 10-K405 10-K405/A 10-Q 10-Q/A 3 3/A 4 4/A 424B1 424B3 424B5 425 5 8-A12G 8-K 8-K/A ARS CORRESP CT ORDER DEF 14A DEFA14A DEFM14A DEFR14A EFFECT NT 10-K NT 10-K/A NT 10-Q PRE 14A REGDEX RW S-1 S-1/A S-1MEF S-3 S-3/A S-4 S-4/A S-8 S-8 POS SC 13D SC 13D/A SC 13G SC 13G/A SCHEDULE 13D/A SCHEDULE 13G/A SD UPLOAD
Form Description Accession Number Filed Period
DEF 14A DEF 14A 0001193125-26-020762 Jan 23, 2026 Mar 4, 2026
DEF 14A DEF 14A 0000950170-25-008792 Jan 24, 2025 Mar 5, 2025
DEF 14A DEF 14A 0000950170-24-005875 Jan 19, 2024 Mar 6, 2024
DEF 14A DEF 14A 0000950170-23-000975 Jan 20, 2023 Mar 1, 2023
DEF 14A DEF 14A 0000950170-22-000375 Jan 18, 2022 Mar 2, 2022
DEF 14A DEF 14A 0001564590-21-003033 Jan 28, 2021 Mar 23, 2021
DEF 14A DEF 14A 0001564590-20-001918 Jan 24, 2020 Mar 4, 2020
DEF 14A DEF 14A ASYS 2019 ANNUAL MEETING 0000720500-19-000002 Jan 25, 2019 Sep 30, 2018
DEF 14A DEF 14A 0000720500-18-000022 Apr 5, 2018 May 11, 2018
DEF 14A DEF 14A 0000720500-17-000010 Jan 27, 2017 Mar 16, 2017
DEF 14A DEF 14A 0000720500-16-000075 Jan 25, 2016 Mar 9, 2016
DEF 14A DEF 14A 0000720500-15-000014 Mar 11, 2015 Apr 9, 2015
DEF 14A DEF 14A 0000720500-14-000011 Mar 28, 2014 May 8, 2014
DEF 14A DEF 14A 0000720500-13-000003 Jan 24, 2013 Mar 7, 2013
DEF 14A 0000720500-12-000005 Jan 23, 2012 Mar 15, 2012
DEF 14A DEFINITIVE PROXY STATEMENT 0001206774-10-002631 Dec 21, 2010 Jan 20, 2011
DEF 14A DEFINITIVE PROXY STATEMENT 0001206774-10-000141 Jan 29, 2010 Mar 11, 2010
DEF 14A DEFINITIVE PROXY STATEMENT 0001206774-09-000108 Jan 29, 2009 Mar 12, 2009
DEF 14A DEFINITIVE PROXY STATEMENT 0001206774-08-000199 Jan 28, 2008 Mar 13, 2008
DEF 14A NOTICE OF ANNUAL MEETING OF SHAREHOLDERS 0001206774-07-001097 Apr 24, 2007 May 18, 2007
DEF 14A 0001206774-06-000226 Feb 13, 2006 Mar 2, 2006
DEF 14A DEFINITIVE PROXY STATEMENT 0001193125-05-125774 Jun 15, 2005 Jul 8, 2005
DEF 14A DEFINITIVE NOTICE AND PROXY STATEMENT 0001193125-04-010306 Jan 28, 2004 Mar 19, 2004
DEF 14A DEFINITIVE N&PS 0000950147-03-000058 Jan 27, 2003 Feb 28, 2003
DEF 14A DEFINITIVE N&PS OF AMTECH SYSTEMS 0000950147-02-000125 Jan 28, 2002 Mar 29, 2002
DEF 14A DEF 14A 0000950153-01-000256 Feb 20, 2001 Mar 15, 2001
DEF 14A DEFINITIVE N&PS OF AMTECH SYSTEMS, INC. 0000950147-00-000173 Feb 10, 2000 Feb 25, 2000
DEF 14A DEFINITIVE N&PS OF AMTECH SYSTEMS, INC. 0000950147-99-000063 Jan 28, 1999 Feb 26, 1999
DEF 14A NOTICE & PROXY 0000950147-98-000055 Jan 29, 1998 Mar 20, 1998
DEF 14A NOTICE OF SPECIAL MEETING 0000950147-97-000031 Jan 30, 1997 Feb 28, 1997
DEF 14A PROXY STATEMENT 0000950147-96-000027 Jan 29, 1996 Sep 30, 1995