AMTECH SYSTEMS INC — DEF 14A Filings
31 DEF 14A filings on record
This page lists all DEF 14A filings submitted to the SEC by AMTECH SYSTEMS INC (ASYS), sorted by most recent first. Each row links to the full filing on EdgarLookup. AMTECH SYSTEMS INC has filed 31 DEF 14A documents with the SEC since 1995. To view all SEC filings by AMTECH SYSTEMS INC, see the full filings list.
All
10-K
10-K/A
10-K405
10-K405/A
10-Q
10-Q/A
3
3/A
4
4/A
424B1
424B3
424B5
425
5
8-A12G
8-K
8-K/A
ARS
CORRESP
CT ORDER
DEF 14A
DEFA14A
DEFM14A
DEFR14A
EFFECT
NT 10-K
NT 10-K/A
NT 10-Q
PRE 14A
REGDEX
RW
S-1
S-1/A
S-1MEF
S-3
S-3/A
S-4
S-4/A
S-8
S-8 POS
SC 13D
SC 13D/A
SC 13G
SC 13G/A
SCHEDULE 13D/A
SCHEDULE 13G/A
SD
UPLOAD
| Form | Description | Accession Number | Filed | Period |
|---|---|---|---|---|
| DEF 14A | DEF 14A | 0001193125-26-020762 | Jan 23, 2026 | Mar 4, 2026 |
| DEF 14A | DEF 14A | 0000950170-25-008792 | Jan 24, 2025 | Mar 5, 2025 |
| DEF 14A | DEF 14A | 0000950170-24-005875 | Jan 19, 2024 | Mar 6, 2024 |
| DEF 14A | DEF 14A | 0000950170-23-000975 | Jan 20, 2023 | Mar 1, 2023 |
| DEF 14A | DEF 14A | 0000950170-22-000375 | Jan 18, 2022 | Mar 2, 2022 |
| DEF 14A | DEF 14A | 0001564590-21-003033 | Jan 28, 2021 | Mar 23, 2021 |
| DEF 14A | DEF 14A | 0001564590-20-001918 | Jan 24, 2020 | Mar 4, 2020 |
| DEF 14A | DEF 14A ASYS 2019 ANNUAL MEETING | 0000720500-19-000002 | Jan 25, 2019 | Sep 30, 2018 |
| DEF 14A | DEF 14A | 0000720500-18-000022 | Apr 5, 2018 | May 11, 2018 |
| DEF 14A | DEF 14A | 0000720500-17-000010 | Jan 27, 2017 | Mar 16, 2017 |
| DEF 14A | DEF 14A | 0000720500-16-000075 | Jan 25, 2016 | Mar 9, 2016 |
| DEF 14A | DEF 14A | 0000720500-15-000014 | Mar 11, 2015 | Apr 9, 2015 |
| DEF 14A | DEF 14A | 0000720500-14-000011 | Mar 28, 2014 | May 8, 2014 |
| DEF 14A | DEF 14A | 0000720500-13-000003 | Jan 24, 2013 | Mar 7, 2013 |
| DEF 14A | — | 0000720500-12-000005 | Jan 23, 2012 | Mar 15, 2012 |
| DEF 14A | DEFINITIVE PROXY STATEMENT | 0001206774-10-002631 | Dec 21, 2010 | Jan 20, 2011 |
| DEF 14A | DEFINITIVE PROXY STATEMENT | 0001206774-10-000141 | Jan 29, 2010 | Mar 11, 2010 |
| DEF 14A | DEFINITIVE PROXY STATEMENT | 0001206774-09-000108 | Jan 29, 2009 | Mar 12, 2009 |
| DEF 14A | DEFINITIVE PROXY STATEMENT | 0001206774-08-000199 | Jan 28, 2008 | Mar 13, 2008 |
| DEF 14A | NOTICE OF ANNUAL MEETING OF SHAREHOLDERS | 0001206774-07-001097 | Apr 24, 2007 | May 18, 2007 |
| DEF 14A | — | 0001206774-06-000226 | Feb 13, 2006 | Mar 2, 2006 |
| DEF 14A | DEFINITIVE PROXY STATEMENT | 0001193125-05-125774 | Jun 15, 2005 | Jul 8, 2005 |
| DEF 14A | DEFINITIVE NOTICE AND PROXY STATEMENT | 0001193125-04-010306 | Jan 28, 2004 | Mar 19, 2004 |
| DEF 14A | DEFINITIVE N&PS | 0000950147-03-000058 | Jan 27, 2003 | Feb 28, 2003 |
| DEF 14A | DEFINITIVE N&PS OF AMTECH SYSTEMS | 0000950147-02-000125 | Jan 28, 2002 | Mar 29, 2002 |
| DEF 14A | DEF 14A | 0000950153-01-000256 | Feb 20, 2001 | Mar 15, 2001 |
| DEF 14A | DEFINITIVE N&PS OF AMTECH SYSTEMS, INC. | 0000950147-00-000173 | Feb 10, 2000 | Feb 25, 2000 |
| DEF 14A | DEFINITIVE N&PS OF AMTECH SYSTEMS, INC. | 0000950147-99-000063 | Jan 28, 1999 | Feb 26, 1999 |
| DEF 14A | NOTICE & PROXY | 0000950147-98-000055 | Jan 29, 1998 | Mar 20, 1998 |
| DEF 14A | NOTICE OF SPECIAL MEETING | 0000950147-97-000031 | Jan 30, 1997 | Feb 28, 1997 |
| DEF 14A | PROXY STATEMENT | 0000950147-96-000027 | Jan 29, 1996 | Sep 30, 1995 |